分享 收藏

MCL 提示/傾斜、旋轉(zhuǎn)納米位移臺Align3 系列

品牌：MCL Think Nano
型號： Nano-Align3 Series
產(chǎn)地：美洲美國
供應商報價：面議

北京歐蘭科技發(fā)展有限公司更新時間：2022-03-04 17:31:39

銷售范圍售全國

入駐年限第10年

營業(yè)執(zhí)照

同類產(chǎn)品微定位位移臺(82件)

立即掃碼咨詢

聯(lián)系方式：400-822-6768

聯(lián)系我們時請說明在儀器網(wǎng)（m.yn180.com）上看到的!

掃碼分享

為您推薦

詳細介紹

Features

Low profile: 0.8"
Three axis motion (Z θX θY)
Large center aperture: 2.6" x 2.6"
Long range: 100 μm or 200 μm (Z), 2mradians or 4mradians (θXθY)
Closed loop control

Typical Applications

Z-axis plus tip/tilt alignment
Nanolithography
Microscopy
MEMS

Z tip tilt piezo stage
Product Description

The Nano-Align3 is a three axis (Z, θX , θY) nanopositioning system with a large center aperture. The low profile design of the Nano-Align3 allows it to be integrated into existing instrumentation where space is restricted. The center aperture makes the Nano-Align3 ideal for demanding microscopy alignment applications which require long range travel and high precision. Internal position sensors utilizing proprietary PicoQ? technology provide picometer and nanoradian precision under closed loop control.

Technical Specifications
Ranges of motion (Nano-Align3-100)
Z axis	100 μm
θX and θY	2 mradian
Ranges of motion (Nano-Align3-200)
Z axis	200 μm
θX and θY	4 mradian
Resolution (Nano-Align3-100)	0.2nm/ 4 nradian
Resolution (Nano-Align3-200)	0.4nm/ 8 nradian
Resonant Frequency (Nano-Align3-100)	600 Hz ±20%
Resonant Frequency (Nano-Align3-200)	450 Hz ±20%
Stiffness	1.0 N/μm
Recommended max. load (horizontal)*	0.5 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Aluminum, Titanium, or Invar
Controller	Nano-Drive?/Nano-Drive?85
* Larger load requirements should be discussed with our engineering staff.