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MCL提示/傾斜、旋轉(zhuǎn)納米位移臺Man5

品牌：MCL Think Nano
型號： Nano-Man5
產(chǎn)地：美洲美國
供應(yīng)商報價：面議

北京歐蘭科技發(fā)展有限公司更新時間：2022-03-04 17:31:39

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詳細(xì)介紹

Features

Compact size
Five axis motion (XYZ θ_Xθ_Y)
50 μm x 50 μm x 25 μm x 1mrad x 1mrad
ranges of motion
Center aperture: 0.25"
Closed loop control

Typical Applications

Alignment
MEMS
Nanolithography
SEM

Product Description

The Nano-Man5 is a five axis (X, Y, Z, θX , θY) nanopositioning system with a 0.25” diameter center aperture. The compact design of the Nano-Man5 allows it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. The Nano-Man5 is ideal for alignment applications which require three linear axes of motion combined with “tip” and “tilt” (θ_Xθ_Y). Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. The Nano-Man5 is also available in high vacuum (non-bakeable) compatible models. Similar to the Nano-Man5, the Nano-M350 shares the same physical dimensions but has only three axes (XYZ) of motion.

Technical Specifications
Range of motion (X)	50 μm
Range of motion (Y)	50 μm
Range of motion (Z)	25 μm
Range of motion (θ_X)	1 mradian
Range of motion (θ_Y)	1 mradian
Resolution (X)	0.1 nm
Resolution (Y)	0.1 nm
Resolution (Z)	0.05 nm
Resolution (θ_X)	2 nradian
Resolution (θ_Y)	2 nradian
Resonant Frequency (X)	1 kHz ±20%
Resonant Frequency (Y)	700 Hz ±20%
Resonant Frequency (Z)	700 Hz ±20%
Stiffness	1.0 N/μm
Recommended max. load (horizontal)*	0.2 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Al and Titanium, or Invar
Controller	Nano-Drive
* Larger load requirements 首ld be discussed with our engineering staff.